Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS

Nader Mohammadi; Arash Mohammadzadeh; Farahnaz Fallah Tafti

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International Journal of Engineering & Technology Sciences

IJETS 2014, 2(6), 461-473

Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS

Authors

Nader Mohammadi^a,

[email protected]

Journals

IJETS* 2015, 3(2), 178-194

Analytical and experimental evaluation of cabin noise sources of MB 1924 truck and its acoustic treatment

IJETS 2015, 3(2), 144-158

Nonlinear vibration analysis of functionally graded beam on Winkler-Pasternak foundation under mechanical and thermal loading via perturbation analysis method

IJETS 2015, 3(1), 65-78

Optimizing the Collector Performance of a Solar Domestic Hot Water System by the Use of Imperialist Competitive Algorithm with the Help of Exergy Concept

IJETS 2014, 2(6), 487-496

Extracting the Optimal Vibration Coefficients of Forefoot Offloading Shoes Using Genetic Algorithms

IJETS 2014, 2(6), 461-473

Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS

Conference

Arash Mohammadzadeh^a, Farahnaz Fallah Tafti^b

a Department of Mechanical Engineering, Islamic Azad University, Parand Branch, Tehran, Iran
b Department of Biomedical Engineering, Amirkabir University of Technology, Tehran, Iran

ABSTRACT

In this paper, optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor has been intended. The aim of this study is to find an optimal diaphragm shape by Finite Element Method (FEM) using ABAQUS®, which is the most suitable software in this area. Optimal diaphragm shape is a one, that results in reasonable output stimuli with maximal deflection and minimal stress. Three different shapes of diaphragms are considered in this study, they are circular, square and rectangular diaphragms. Another purpose of this study is to find out the effect of holes in these diaphragms. With respect to applied stress and sensor output, results were showing that circular shaped diaphragms are performing much more efficient than other shapes. Moreover Rectangular holes have better influence on the function of diaphragms too.

Diaphragm shape; Holes; MEMS; Piezoresistive pressure sensor; Wheatstone Bridge.

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International Journal of Engineering & Technology Sciences

Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS

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Journals *IJETS* 2015, 3(2), 178-194 Analytical and experimental evaluation of cabin noise sources of MB 1924 truck and its acoustic treatment *IJETS* 2015, 3(2), 144-158 Nonlinear vibration analysis of functionally graded beam on Winkler-Pasternak foundation under mechanical and thermal loading via perturbation analysis method *IJETS* 2015, 3(1), 65-78 Optimizing the Collector Performance of a Solar Domestic Hot Water System by the Use of Imperialist Competitive Algorithm with the Help of Exergy Concept *IJETS* 2014, 2(6), 487-496 Extracting the Optimal Vibration Coefficients of Forefoot Offloading Shoes Using Genetic Algorithms *IJETS* 2014, 2(6), 461-473 Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS
Conference